JPH051780Y2 - - Google Patents

Info

Publication number
JPH051780Y2
JPH051780Y2 JP2948286U JP2948286U JPH051780Y2 JP H051780 Y2 JPH051780 Y2 JP H051780Y2 JP 2948286 U JP2948286 U JP 2948286U JP 2948286 U JP2948286 U JP 2948286U JP H051780 Y2 JPH051780 Y2 JP H051780Y2
Authority
JP
Japan
Prior art keywords
bolt
head
instrument case
wall surface
notch
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP2948286U
Other languages
English (en)
Japanese (ja)
Other versions
JPS62141717U (en]
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP2948286U priority Critical patent/JPH051780Y2/ja
Publication of JPS62141717U publication Critical patent/JPS62141717U/ja
Application granted granted Critical
Publication of JPH051780Y2 publication Critical patent/JPH051780Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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  • Connection Of Plates (AREA)
JP2948286U 1986-02-28 1986-02-28 Expired - Lifetime JPH051780Y2 (en])

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2948286U JPH051780Y2 (en]) 1986-02-28 1986-02-28

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2948286U JPH051780Y2 (en]) 1986-02-28 1986-02-28

Publications (2)

Publication Number Publication Date
JPS62141717U JPS62141717U (en]) 1987-09-07
JPH051780Y2 true JPH051780Y2 (en]) 1993-01-18

Family

ID=30833401

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2948286U Expired - Lifetime JPH051780Y2 (en]) 1986-02-28 1986-02-28

Country Status (1)

Country Link
JP (1) JPH051780Y2 (en])

Families Citing this family (20)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6620723B1 (en) 2000-06-27 2003-09-16 Applied Materials, Inc. Formation of boride barrier layers using chemisorption techniques
US7405158B2 (en) 2000-06-28 2008-07-29 Applied Materials, Inc. Methods for depositing tungsten layers employing atomic layer deposition techniques
US6551929B1 (en) 2000-06-28 2003-04-22 Applied Materials, Inc. Bifurcated deposition process for depositing refractory metal layers employing atomic layer deposition and chemical vapor deposition techniques
US7101795B1 (en) 2000-06-28 2006-09-05 Applied Materials, Inc. Method and apparatus for depositing refractory metal layers employing sequential deposition techniques to form a nucleation layer
US6765178B2 (en) 2000-12-29 2004-07-20 Applied Materials, Inc. Chamber for uniform substrate heating
US6998579B2 (en) 2000-12-29 2006-02-14 Applied Materials, Inc. Chamber for uniform substrate heating
US6951804B2 (en) 2001-02-02 2005-10-04 Applied Materials, Inc. Formation of a tantalum-nitride layer
US6878206B2 (en) 2001-07-16 2005-04-12 Applied Materials, Inc. Lid assembly for a processing system to facilitate sequential deposition techniques
US6734020B2 (en) 2001-03-07 2004-05-11 Applied Materials, Inc. Valve control system for atomic layer deposition chamber
US7211144B2 (en) 2001-07-13 2007-05-01 Applied Materials, Inc. Pulsed nucleation deposition of tungsten layers
US7085616B2 (en) 2001-07-27 2006-08-01 Applied Materials, Inc. Atomic layer deposition apparatus
US6936906B2 (en) 2001-09-26 2005-08-30 Applied Materials, Inc. Integration of barrier layer and seed layer
US7049226B2 (en) 2001-09-26 2006-05-23 Applied Materials, Inc. Integration of ALD tantalum nitride for copper metallization
US6916398B2 (en) 2001-10-26 2005-07-12 Applied Materials, Inc. Gas delivery apparatus and method for atomic layer deposition
US6911391B2 (en) 2002-01-26 2005-06-28 Applied Materials, Inc. Integration of titanium and titanium nitride layers
US6998014B2 (en) 2002-01-26 2006-02-14 Applied Materials, Inc. Apparatus and method for plasma assisted deposition
US6833161B2 (en) 2002-02-26 2004-12-21 Applied Materials, Inc. Cyclical deposition of tungsten nitride for metal oxide gate electrode
US7439191B2 (en) 2002-04-05 2008-10-21 Applied Materials, Inc. Deposition of silicon layers for active matrix liquid crystal display (AMLCD) applications
US7262133B2 (en) 2003-01-07 2007-08-28 Applied Materials, Inc. Enhancement of copper line reliability using thin ALD tan film to cap the copper line
US7211508B2 (en) 2003-06-18 2007-05-01 Applied Materials, Inc. Atomic layer deposition of tantalum based barrier materials

Also Published As

Publication number Publication date
JPS62141717U (en]) 1987-09-07

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